PRODUCTS
CETC NEW ENERGY
High temperature purification equipment
Classification:
Product introduction
The equipment is a process in which graphite products, carbon felt or SiC powder are calcined at high temperature and process gas is directed to flow, and impurity elements are discharged from the matrix through physical diffusion and chemical reaction to form low ash content (5ppmw) and metal content is reduced to PPB order of magnitude, thus achieving the requirements of semiconductor crystal growth on graphite quality (or powder raw material).
Technical parameters
Maximum temperature: 2500 ℃ Common working temperature: 2200 ℃
Temperature uniformity: ≤ ± 5 ℃ Instrument temperature control accuracy: ± 1 ℃
Vacuum time: ≤ 120min
| Effective working space (mm) | Maximum temperature (℃) |
| 840-840-660 | 2200 |
| Φ1380-900 | 2500 |
| Φ1300-820 | 2500 |
| Φ1300-1050 | 2500 |
| Φ1400mm-1050 | 2500 |
| Φ1400mm-2000 | 2500 |
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